Design and Fabrication of Microelectromechanical Devices OpenCourseWare: A Free MIT Grad-Level Course on Microsystem Design

Published Jan 06, 2009

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'Design and Fabrication of Microelectromechanical Devices' is a free OpenCourseWare that teaches students how to build very small structures that incorporate both electrical or electromagnetic and mechanical aspects. Made of polymers, silicon and metals, microelectromechanical systems or 'MEMS' are built using techniques of deposition, photolithography, etching and anodic bonding. Students in MIT's Bachelor of Science in Electrical Engineering and Computer Science or Master of Engineering degree programs count this course toward their degree.

Design and Fabrication of Microelectromechanical Devices: Course Specifics

Degree Level Free Audio Video Downloads
Graduate Yes No No Yes

Lectures/Notes Study Materials Tests/Quizzes
Yes Yes No

Design and Fabrication of Microelectromechanical Devices: Course Description

Welcome to the tiny world of microelectromechanical devices and systems. Pressure sensors, rate gyroscopes and a host of other small measurement and display assemblies are examples of MEMS, or microelectromechanical devices. Professors Carol Livermore and Joel Voldman start the class with a brief overview of what MEMS are and of their design and construction. Following lectures address fabrication techniques, bulk micromachining, finishing surfaces, bonding, etching and the important skill of creating process flows. Next, students study the multiple properties of different materials used to make MEMS. Consider systems and transducers through lumped modeling. Examine system dynamics. Brush up on mechanical and electronic knowledge. By the end of the course, students will also have studied fluid dynamics, thermal energy, optical MEMS, power MEMS and bioMEMS, feedback, noise and packaging. Assignments are design problems, to be done individually or with a team of fellow students. Students will need a textbook and MATLAB software.

All lecture notes, assignments with solutions, project guidelines and a sample project are available for download. Explore and build the micro-world with this free course in the design and fabrication of microelectromechanical devices.

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