Physics of Microfabrication (Front End Processing) OpenCourseWare: MIT's Free Online Graduate Level Course on Microfabrication

Published Jan 06, 2009

RSS Feed

At the scale on which semiconductors and other micromachines are built, classical physics sometimes breaks down. Electrostatic effects are more powerful than thermal mass effects, for example. The Massachusetts Institute of Technology (MIT) in Cambridge, Massachusetts, offers the 'Physics of Microfabrication (Front End Processing)' free OpenCourseWare. Students in a Master of Science in Electrical Engineering or Computer Science or Master of Engineering degree programs should find this course useful, as well as those considering a career in microelectronics or microfabrication.

Physics of Microfabrication (Front End Processing): Course Specifics

Degree Level Free Audio Video Downloads
Graduate Yes Yes No Yes

Lectures/Notes Study Materials Tests/Quizzes
Yes No No

Physics of Microfabrication (Front End Processing): Course Description

Professor Judy Hoyt of MIT teaches you how silicon wafers are made and used in microfabrication. Begin by growing the crystals and making the wafer. Now move on to gettering, oxidation and the Deal/Grove model, dopant diffusion, ion implantation and annealing, selective-area epitaxial growth and multiple kinds of etching. Students will learn about building gates in traditional and novel ways. Throughout the course students learn techniques for discovering and correcting defects in the fabrication of silicon circuits. Students will learn about the latest construction techniques and materials, including Silicon Germanium (SiGe). Finally, study the effects of stress or strain upon these tiny constructions.

All lecture notes, recorded in audio, are included in the course downloads. No assignments or sample projects are included. Learn about the creation of silicon circuits and microdevices by visiting the physics of microfabrication course page.

Featured School Choices: